APPARATUS FOR STUDY OF THE NEUTRAL COMPONENT OF ION SURFACE SPUTTERING.

被引：0

作者：

Ayukhanov, A.Kh. ^{[1
]}

Kremkov, M.V. ^{[1
]}

Turmashev, E. ^{[1
]}

Khasanov, U. ^{[1
]}

机构：

[1] Acad of Sciences of the Uzbek SSR, Tashkent, USSR, Acad of Sciences of the Uzbek SSR, Tashkent, USSR

来源：

Instruments and experimental techniques New York | 1986年 / 29卷 / 2 pt 2期

关键词：

SPUTTERING;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The apparatus contains a source of alkali-metal ions whose beam has been made monoenergetic in the field of a 90 degree electrostatic condenser, a sputtering and ionization chamber, an additional ionizing target for the neutral component, a section-type mass spectrometer with a central angle of 60 degree set up for analysis of negative ions of light metals (up to 200 amu) and equipped with a scanning unit, and systems for signal amplification and recording. Mass spectra of the negatively ionized component of Nichrome, Si, and Ge sputtering are given.

引用

页码：437 / 440

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