共 50 条
- [21] Study of a novel silicon micromachined gyroscope SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 746 - 748
- [23] Toward the micromachined vibrating gyroscope using (111) silicon wafer process MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VII, 2001, 4557 : 40 - 48
- [25] Modeling for random drift of the micromachined rate gyroscope ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS, 2007, : 4946 - 4949
- [26] Dual axis operation of a micromachined rate gyroscope TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 883 - 886
- [27] A bulk micromachines vibrating wheel rate gyroscope MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES, 2001, 4601 : 54 - 58
- [28] Design of a novel micromachined gyroscope with compensatory capacitance PROGRESSES IN FRACTURE AND STRENGTH OF MATERIALS AND STRUCTURES, 1-4, 2007, 353-358 : 2778 - 2781
- [29] An Electrostatically Actuated Micromachined Vibrating Ring Gyroscope with highly Symmetric Support beams 2010 IEEE SENSORS, 2010, : 860 - 863