Low-temperature crystallization of sol-gel-derived Pb(Zr,Ti)O3 thin films

被引：0
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作者：
Fujimori, Yoshikazu [1 ]
Nakamura, Takashi [1 ]
Takasu, Hidemi [1 ]
机构：
[1] Device Technology Div., Semiconductor R and D Headquarters, ROHM Co., Ltd., 21, Saiin Mizosaki-chom, Ukyo-ku, Kyoto 615-8585, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 9 B期
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页码：5346 / 5349
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