HISTORICAL PERSPECTIVES ON ION IMPLANTATION.

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作者：
Gibbons, James F. [1 ]
机构：
[1] Stanford Univ, Stanford, CA, USA, Stanford Univ, Stanford, CA, USA
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B21卷 / 2-4期
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摘要：
MATERIALS
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页码：83 / 89
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