Contactless method for electrical characterization of silicon-on-insulator materials

被引：0
|
作者：
Okumura, T. [1 ]
Eguchi, K. [1 ]
En, A. [1 ]
Suhara, M. [1 ]
机构：
[1] Department of Electrical Engineering, Tokyo Metropolitan University, Minami-ohsawa, Hachioji, Tokyo 192-0397, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 9 A期
关键词：
Contactless characterization - Kelvin-probe method - Surface photovoltage measurement;
D O I：
10.1143/jjap.40.5217
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：5217 / 5220
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