Formation of Silicides in Thin Tungsten or Molybdenum Films.

被引：0
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作者：
Oertel, Bernd
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来源：
Wissenschaftliche Zeitschrift - Technische Hochschule Ilmenau | 1979年 / 25卷 / 06期
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Compendex;
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摘要：
SEMICONDUCTOR DEVICE MANUFACTURE
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页码：151 / 156
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