MAGNETRON SYSTEMS FOR ION SPUTTERING OF MATERIALS (REVIEW).

被引：0
|
作者：
Danilin, B.S.
Sirchin, V.K.
机构：
来源：
| 1978年 / 21卷 / 4 pt 1期
关键词：
Compendex;
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学科分类号：
摘要：
SPUTTERING
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页码：835 / 847
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