MAGNETRON SYSTEMS FOR ION SPUTTERING OF MATERIALS (REVIEW).

被引：0

|

作者：

Danilin, B.S.

Sirchin, V.K.

机构：

来源：

| 1978年 / 21卷 / 4 pt 1期

关键词：

Compendex;

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学科分类号：

摘要：

SPUTTERING

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页码：835 / 847

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