Surface processing with ionized cluster beams: computer simulation

被引：0
|
作者：
Insepov, Z. [1 ]
Yamada, I. [1 ]
机构：
[1] Ion Beam Eng. Exp. Laboratory, Kyoto Univ., Yoshida-Honmachi, K., Sakyo-ko, Japan
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1999年 / 153卷 / 1-4期
关键词：
Computer simulation - Hardness - Ion implantation - Molecular dynamics - Monte Carlo methods - Morphology - Rapid thermal annealing - Solids - Surface treatment;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：199 / 208
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