Deposition of DLC Thin Films by Electron Beam Excited Plasma CVD - Strongly Adhesive, Highly Lubricative, Low-Cost DLC Thin Films -

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作者
Ban, Masahito [1 ]
Ryoji, Makoto [1 ]
Hasegawa, Takeshi [1 ]
Mori, Yukitaka [1 ]
Tokai, Masakuni [1 ]
Fujioka, Junzo [1 ]
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[1] Kanto Technical Institute, Kawasaki Heavy Industries, Ltd., 118 Futatuzuka, Noda, Chiba 278-8585, Japan
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New Diamond and Frontier Carbon Technology | / 9卷 / 02期
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页码:158 / 162
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