Deposition of DLC Thin Films by Electron Beam Excited Plasma CVD - Strongly Adhesive, Highly Lubricative, Low-Cost DLC Thin Films -

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作者：
Ban, Masahito [1 ]
Ryoji, Makoto [1 ]
Hasegawa, Takeshi [1 ]
Mori, Yukitaka [1 ]
Tokai, Masakuni [1 ]
Fujioka, Junzo [1 ]
机构：
[1] Kanto Technical Institute, Kawasaki Heavy Industries, Ltd., 118 Futatuzuka, Noda, Chiba 278-8585, Japan
来源：
New Diamond and Frontier Carbon Technology | / 9卷 / 02期
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页码：158 / 162
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