Production of precision silicon micromachined non-spherical particles for aerosol studies

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[1] Kaye, P.H.
[2] Micheli, F.
[3] Tracey, M.C.
[4] Hirst, E.
[5] Gundlach, A.M.
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Kaye, P.H. | 1600年 / 23期
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