DEGRADATION OF POLY(METHYL METHACRYLATE) IN CF4 AND CF4/O2 PLASMAS.

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作者：
Wu, B.J. [1 ]
Hess, D.W. [1 ]
Soong, D.S. [1 ]
Bell, A.T. [1 ]
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[1] Department of Chemical Engineering, University of California, Berkeley, CA 94720, United States
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| 1725年 / 54期
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