Fabrication of antenna-coupled microbolometers

被引：0
|
作者：
Shimizu, Takashi [1 ]
Moritsu, Haruhito [1 ]
Yasuoka, Yoshizumi [1 ]
Gamo, Kenji [1 ]
机构：
[1] Natl Defense Acad, Yokosuka, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1995年 / 34卷 / 12 A期
关键词：
Antenna coupled detector - Antenna coupled microbolometer - Far infrared lasers - Impedance matching - Laser radiation - Thermal coefficient - Thin film antenna;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：6352 / 6357
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