Fabrication of zinc oxide transparent thin-film transistor with ZrO 2 insulating layer by sol-gel method

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作者：
Ohya, Yutaka [1 ]
Kume, Takashi [1 ]
Ban, Takayuki [1 ]
机构：
[1] Faculty of Engineering, Gifu University, Yanagido 1-1, Gifu 501-1193, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2005年 / 44卷 / 4 A期
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页码：1919 / 1922
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