a-Si3N4:H/a-Si:H superlattices produced by plasma enhanced nitridation of a-Si:H

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[1] Hazama, Yasushi
[2] Yamada, Keiichi
[3] Miyazaki, Seiichi
[4] Hirose, Masataka
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Hazama, Yasushi | 1600年 / 114期
关键词：
Amorphous Semiconductor Superlattices - Hydrogenated Amorphous Silicon - Hydrogenated Amorphous Silicon Nitride - Plasma-Enhanced Nitriding;
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