APPARATUS FOR QUANTITATIVELY DETECTING IONIC CONTAMINATION.

被引：0
|
作者：
Garbarini, V.C.
机构：
来源：
Technical Digest - Western Electric Company | 1979年 / 53期
关键词：
D O I：
暂无
中图分类号：
TN [电子技术、通信技术];
学科分类号：
0809 ;
摘要：
An apparatus is presented to detect ionic contamination on the surface of microelectronic components in the nanogram range of contamination expressed as the equivalent to the conductivity increase caused by sodium chloride.
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页码：7 / 8
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