THERMOELEASTIC RESPONSE OF POLYCRYSTALLINE Si TO AN INTENSE CW LASER BEAM.

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作者
Liarokapis, E. [1 ]
Anastassakis, E. [1 ]
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[1] Natl Techhnical Univ, Athens, Greece, Natl Techhnical Univ, Athens, Greece
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LASER BEAMS - Effects - MATHEMATICAL TECHNIQUES - Applications - STRAIN - STRESSES - Thermal;
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摘要
We have used analytic methods to obtain closed forms for the thermal strains induced on polycrystalline Si when a cw visible laser beam is focused on its surface. The material is treated as isotropic with appropriately chosen elastic constants. The solution is expressed in terms of the Galerkin vectors for a semi-infinite bulk medium under point dilatation. The results show that considerable strains (corresponding to typical compressive stresses up to 0. 5 GPa) are produced even for laser power densities lower than the threshold for melting. Three-dimensional graphical representations are given for the elastic displacements, the strain, and stress components, as a function of appropriate geometrical coordinates.
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页码:84 / 89
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