Surface-micromachined capacitive differential pressure sensor with lithographically defined silicon diaphragm

被引：0
|
作者：
Univ of Michigan, Ann Arbor, United States [1 ]
机构：
来源：
J Microelectromech Syst | / 2卷 / 98-105期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
16
引用
收藏
相关论文
共 50 条
  • [41] CAPSS - A THIN DIAPHRAGM CAPACITIVE PRESSURE SENSOR SIMULATOR
    BIN, TY
    HUANG, RS
    SENSORS AND ACTUATORS, 1987, 11 (01): : 1 - 22
  • [42] A broadband, capacitive, surface-micromachined, omnidirectional microphone with more than 200kHz bandwidth
    Kuntzman, Michael L.
    Hall, Neal A.
    JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, 2014, 135 (06): : 3416 - 3424
  • [43] CMOS surface micromachined pressure sensor
    Dai, Ching-Liang
    Chang, Pei-Zen
    Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an, 1999, 22 (03): : 375 - 380
  • [44] A CMOS surface micromachined pressure sensor
    Dai, CL
    Chang, PZ
    JOURNAL OF THE CHINESE INSTITUTE OF ENGINEERS, 1999, 22 (03) : 375 - 380
  • [45] Surface-micromachined silicon air-gap Bragg reflector for thermal infrared
    Tuohiniemi, M.
    Blomberg, M.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, 21 (07)
  • [46] Thermal characterization of surface-micromachined silicon nitride membranes for thermal infrared detectors
    Eriksson, P
    Andersson, JY
    Stemme, G
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 1997, 6 (01) : 55 - 61
  • [47] A Surface-Micromachined MEMS Acoustic Sensor with 0.8 μm CMOS Impedance Transducer
    Lee, Jaewoo
    Je, C. H.
    Yang, W. S.
    Yang, Y. S.
    Kim, Jongdae
    2010 IEEE SENSORS, 2010, : 1779 - 1782
  • [48] Design of a novel micromachined capacitive engine oil pressure sensor
    Soleimani, S
    Abbaspour-Sani, E
    2002 IEEE INTERNATIONAL CONFERENCE ON SEMICONDUCTOR ELECTRONICS, PROCEEDINGS, 2002, : 57 - 61
  • [49] SYMMETRICAL DIFFERENTIAL CAPACITIVE PRESSURE SENSOR
    PETERS, RD
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (08): : 2256 - 2261
  • [50] A micromachined silicon capacitive temperature sensor for wide temperature range applications
    Ma, Hong-Yu
    Huang, Qing-An
    Qin, Ming
    Lu, Tingting
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 20 (05)
12345