LASER PROCESSING IN SILICON MICROELECTRONICS TECHNOLOGY.

被引：0
|
作者：
Leamy, H.J.
机构：
来源：
IEEE transactions on components, hybrids, and manufacturing technology | 1981年 / CHMT-5卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Laser irradiation may effect either thermal or chemical changes in target materials. A brief review of the mechanisms involved and a summary assessment of their potential for application in silicon microelectronics technology is presented.
引用
收藏
页码：112 / 117
相关论文
共 50 条
  • [21] Laser Applications in Hybrid Technology.
    Fischer, A.
    Wottawa, H.
    Brode, W.
    Feingeratetechnik Berlin, 1988, 37 (06): : 262 - 263
  • [22] Laser processing for microelectronics packaging applications
    Illyefalvi-Vitéz, Z
    Ruszinkó, M
    Pinkola, J
    1999 INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS, PROCEEDINGS, 1999, 3906 : 586 - 591
  • [23] SPECIAL ISSUE ON LASER PROCESSING IN MICROELECTRONICS
    ZAPKA, W
    MICROELECTRONIC ENGINEERING, 1993, 20 (1-2) : 1 - 2
  • [24] Laser processing for microelectronics packaging applications
    Illyefalvi-Vitéz, Z
    MICROELECTRONICS RELIABILITY, 2001, 41 (04) : 563 - 570
  • [25] Silicon-on-Sapphire (SOS) Technology.
    Schwob, P.
    Bulletin de l'Association Suisse des Electriciens, 1977, 68 (02): : 60 - 65
  • [26] MATERIAL ISSUES IN AMORPHOUS SILICON TECHNOLOGY.
    Tsai, C.C.
    Thompson, M.J.
    Hauptman, S.
    Solar Cells, 1986, 19 (3-4): : 259 - 261
  • [27] LCLD laser processing technology for microelectronics printed-circuit boards of new generation
    Semenok, Dmitriy
    7TH INTERNATIONAL CONFERENCE INTERDISCIPLINARITY IN ENGINEERING (INTER-ENG 2013), 2014, 12 : 277 - 282
  • [28] Structural Modeling in Mechanical Processing Technology.
    Richter, D.M.
    Freiberger Forschungshefte (Reihe) A, 1983,
  • [29] LPCVD and PECVD silicon nitride for microelectronics technology
    Joshi, BC
    Eranna, G
    Runthala, DP
    Dixit, BB
    Wadhawan, OP
    Vyas, PD
    INDIAN JOURNAL OF ENGINEERING AND MATERIALS SCIENCES, 2000, 7 (5-6) : 303 - 309
  • [30] REFINEMENT OF SECONDARY PLASTICS PROCESSING TECHNOLOGY.
    Galiguzova, T.V.
    Dmitrieva, M.N.
    Chemical and Petroleum Engineering, 1983, 19 (7-8) : 314 - 315
12345