Low-temperature GaAs metalorganic chemical vapor deposition using dimethylamine gallane and arsine

被引：0
|
作者：
机构：
[1] Yamauchi, Yoshiharu
[2] Kobayashi, Naoki
来源：
Yamauchi, Yoshiharu | 1600年 / 32期
关键词：
12;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] LOW-TEMPERATURE METALORGANIC CHEMICAL VAPOR-DEPOSITION OF GAAS ON SI BY ALTERNATE GAS-FLOW OF THE SOURCE MATERIALS
    FUJITA, K
    KANAO, H
    MATSUDA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (2A): : 225 - 226
  • [22] Annealing effects on low-temperature GaN layer grown by metalorganic chemical vapor deposition
    Kim, BY
    Choi, YH
    Hong, CH
    Kim, SH
    Yoo, TK
    COMPOUND SEMICONDUCTORS 1995, 1996, 145 : 291 - 294
  • [23] Low-temperature growth and characterization of epitaxial ZnO nanorods by metalorganic chemical vapor deposition
    Kim, Dong Chan
    Kong, Bo Hyun
    Jeon, Sung-Yun
    Yoo, Ji-Beom
    Cho, Hyung Koun
    Park, Dong Jun
    Lee, Jeong Yong
    JOURNAL OF MATERIALS RESEARCH, 2007, 22 (07) : 2032 - 2036
  • [24] EPITAXIAL-GROWTH OF HGTE BY LOW-TEMPERATURE METALORGANIC CHEMICAL VAPOR-DEPOSITION
    WANG, CH
    LU, PY
    WILLIAMS, LM
    CHU, SNG
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (04) : C176 - C176
  • [25] GROWTH OF INALAS/INGAAS MODULATION-DOPED STRUCTURES ON LOW-TEMPERATURE INALAS BUFFER LAYERS USING TRIMETHYLARSENIC AND ARSINE BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION
    PAN, N
    ELLIOTT, J
    CARTER, J
    HENDRIKS, H
    AUCOIN, L
    GALLIUM ARSENIDE AND RELATED COMPOUNDS 1993, 1994, 136 (136): : 655 - 660
  • [26] Low-temperature growth and characterization of epitaxial ZnO nanorods by metalorganic chemical vapor deposition
    Kim D.C.
    Kong B.H.
    Jeon S.-Y.
    Yoo J.-B.
    Cho H.K.
    Park D.J.
    Lee J.Y.
    Journal of Materials Research, 2007, 22 (7) : 2032 - 2036
  • [27] Low-temperature metalorganic chemical vapor deposition of molybdenum disulfide on multicomponent glass substrates
    Simonson, Nicholas A.
    Nasr, Joseph R.
    Subramanian, Shruti
    Jariwala, Bhakti
    Zhao, Rui
    Das, Saptarshi
    Robinson, Joshua A.
    FLATCHEM, 2018, 11 : 32 - 37
  • [28] LOW-TEMPERATURE HETEROEPITAXIAL GROWTH OF INSB ON CDTE BY METALORGANIC CHEMICAL VAPOR-DEPOSITION
    CHEN, JC
    BUSH, P
    CHEN, WK
    LIU, PL
    APPLIED PHYSICS LETTERS, 1988, 53 (09) : 773 - 775
  • [29] GAAS P-I-N PHOTODIODES MADE BY METALORGANIC CHEMICAL VAPOR-DEPOSITION USING TERTIARYBUTYLARSINE AND ARSINE
    SERREZE, HB
    BAUMANN, JA
    BUNZ, L
    SCHACHTER, R
    ESMAN, RD
    APPLIED PHYSICS LETTERS, 1989, 55 (24) : 2532 - 2534
  • [30] Low-temperature luminescent properties of degenerate p-type GaAs grown by low-pressure metalorganic chemical vapor deposition
    Chen, H.D., 1600,
12345