Coating of SiC on stainless steel using biased plasma CVD

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[1] Yano, Mototake
[2] Aozasa, Masao
[3] Kawano, Kazuhiko
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Yano, Mototake | 1600年 / Ceramic Soc of Japan, Shinjuku-ku, Tokyo, Japan卷 / 103期
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Ceramic coatings;
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