Optical and electrical properties of Sn-doped indium oxide films deposited on polyester by reactive evaporation

被引：0
|
作者：
Ma, Jin [1 ]
Zhang, Dehang [1 ]
Li, Shuying [1 ]
Zhao, Junqing [1 ]
Ma, Honglei [1 ]
机构：
[1] Shandong Univ, Jinan, China
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1998年 / 37卷 / 10期
关键词：
Carrier concentration - Carrier mobility - Deposition - Electric conductivity - Evaporation - Light transmission - Optical films - Plastic films - Polyimides - Semiconducting indium compounds - Semiconductor doping - Transparency;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Transparent conducting Sn-doped indium oxide (ITO) films have been prepared on polyimide (PI) thin film substrate at low substrate temperature by reactive evaporation. The structural, optical and electrical properties of the deposited films have been investigated. High quality films with resistivity as low as 7×10-4 Ω·cm and transmittance over 80% have been obtained. The temperature dependence of mobility and carrier concentration have been measured over a temperature range 10-400 K. Corresponding scattering mechanism of charge carriers in the films have been discussed.
引用
收藏
页码：5614 / 5617
相关论文
共 50 条
  • [1] Optical and electrical properties of Sn-doped indium oxide films deposited on polyester by reactive evaporation
    Ma, J
    Zhang, DH
    Li, SY
    Zhao, JQ
    Ma, HL
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (10): : 5614 - 5617
  • [2] Optical properties of epitaxial Sn-doped indium oxide films
    Vengalis, B
    Butkute, R
    Lisauskas, V
    Kindurys, A
    SMART OPTICAL INORGANIC STRUCTURES AND DEVICES, 2001, 4318 : 284 - 289
  • [3] PROPERTIES OF SN-DOPED INDIUM OXIDE COATINGS DEPOSITED ON POLYESTER FILM BY HIGH-RATE REACTIVE SPUTTERING
    ITOYAMA, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (04) : 691 - 694
  • [4] Preparation and properties of indium tin oxide films deposited on polyester substrates by reactive evaporation
    Ma, J
    Li, SY
    Zhao, JQ
    Ma, HL
    THIN SOLID FILMS, 1997, 307 (1-2) : 200 - 202
  • [5] Electrical, optical and photoconductive properties of Sn-doped indium sulfofluoride thin films
    Vygranenko, Y.
    Fernandes, M.
    Vieira, M.
    Lavareda, G.
    de Carvalho, C. Nunes
    Brogueira, P.
    Amaral, A.
    Barradas, N. P.
    Alves, E.
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2021, 121
  • [6] The effect of substrate temperature on the microstructural, electrical and optical properties of Sn-doped indium oxide thin films
    Raoufi, Davood
    Taherniya, Atefeh
    EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2015, 70 (03):
  • [7] Electrical resistivities and thermopowers of transparent Sn-doped indium oxide films
    Li, ZQ
    Lin, JJ
    JOURNAL OF APPLIED PHYSICS, 2004, 96 (10) : 5918 - 5920
  • [8] ELECTRICAL-PROPERTIES OF SN-DOPED IN2O3 FILMS PREPARED BY REACTIVE EVAPORATION
    NOGUCHI, S
    SAKATA, H
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1981, 14 (08) : 1523 - +
  • [9] Thickness dependence of optical properties of amorphous indium oxide thin films deposited by reactive evaporation
    Ulutas, K.
    Deger, D.
    Skarlatos, Y.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2006, 203 (10): : 2432 - 2437
  • [10] TRANSPARENT CONDUCTIVE SN-DOPED INDIUM OXIDE COATINGS DEPOSITED BY REACTIVE SPUTTERING WITH A POST CATHODE
    THORNTON, JA
    HEDGCOTH, VL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1976, 13 (01): : 117 - 121
12345