31P NUCLEAR MAGNETIC RESONANCE STUDY OF LOCAL BONDING CONFIGURATION OF PHOSPHORUS IN AMORPHOUS SILICON-HYDROGEN-PHOSPHORUS ALLOYS.

被引：0

作者：

Hayashi, Shigenobu ^{[1
]}

Hayamizu, Kikuko ^{[1
]}

Yamasaki, Satoshi ^{[1
]}

Matsuda, Akihisa ^{[1
]}

Tanaka, Hazunobu ^{[1
]}

机构：

[1] Natl Chemical Lab for Industry, Tsukuba, Jpn, Natl Chemical Lab for Industry, Tsukuba, Jpn

来源：

Japanese Journal of Applied Physics, Part 2: Letters | 1987年 / 26卷 / 12期

关键词：

HYDROGEN - NUCLEAR MAGNETIC RESONANCE - PHOSPHORUS;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

**3**1P nuclear magnetic resonance (NMR) spectra have been measured for amorphous hydrogenated silicon heavily doped with phosphorus. Phosphorus is enriched in the film during glow-discharge decomposition of the SiH//4-PH//3 mixture at a substrate temperature of 250 degree C by a factor of 3. **3**1P NMR results demonstrate that almost all the phosphorus atoms are bonded to three silicon atoms, and not to hydrogen or to other phosphorus.

引用

页码：2041 / 2043

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