共 50 条
- [42] Texture and hillocking in sputter-deposited copper thin films Journal of Materials Science: Materials in Electronics, 2002, 13 : 285 - 294
- [43] Corrosion behavior of sputter-deposited TiN thin films JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (05): : 1635 - 1638
- [46] Effect of deposition conditions on mechanical stresses and microstructure of sputter-deposited molybdenum and reactively sputter-deposited molybdenum nitride films MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2003, 359 (1-2): : 158 - 167
- [49] STABILITY OF SPUTTER-DEPOSITED ZNOCR FILMS AGAINST ACIDS JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1993, 32 (10B): : L1565 - L1567