Calculation of diamond chemical vapor deposition region in C-H-O, C-H-O-F and C-S-F phase diagrams

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作者：
Rakov, E.G. [1 ]
Modin, A.V. [1 ]
Grunsky, A.V. [1 ]
机构：
[1] D. I. Mendeleev University of Chemical Technology of Russia, Moscow A-47, 125047, Russia
来源：
Journal of Wide Bandgap Materials | 1997年 / 6卷 / 01期
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页码：30 / 34
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