共 50 条
- [42] Reactive ion etching of Silicon Carbide with patterned Boron implantation SILICON CARBIDE AND RELATED MATERIALS 2003, PRTS 1 AND 2, 2004, 457-460 : 925 - 928
- [43] Radiation Silicon Carbide Detectors based on Ion Implantation of Boron 2013 3RD INTERNATIONAL CONFERENCE ON ADVANCEMENTS IN NUCLEAR INSTRUMENTATION, MEASUREMENT METHODS AND THEIR APPLICATIONS (ANIMMA), 2013,
- [46] A study on Silicon Carbide (SiC) wafer using ion implantation 2014 20TH INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2014), 2014,
- [48] Annealing and recrystallization of amorphous silicon carbide produced by ion implantation MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 61-2 : 353 - 357
- [49] EXTENDING CARBIDE TOOL LIFETIME BY METAL-ION IMPLANTATION SURFACE & COATINGS TECHNOLOGY, 1993, 62 (1-3): : 438 - 442
- [50] Gold nanoclusters formation in silicon carbide using ion implantation IIT2002: ION IMPLANTATION TECHNOLOGY, PROCEEDINGS, 2003, : 709 - 712