Advanced nano-scale metrology for the characterization of ceramic materials in the scanning electron microscope

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作者
Pezzotti, Giuseppe [1 ]
Matsutani, Atsuo [1 ]
Munisso, Maria Chiara [1 ]
Zhu, Wenliang [1 ]
机构
[1] Ceramic Physics Laboratory, Research Institute for Nanoscience, RIN Kyoto Institute of Technology, Sakyo-ku, Matsugasaki, 606-8585 Kyoto, Japan
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25
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页码:93 / 101
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