Development of novel type of 172 nm vacuum ultraviolet light source

被引：0
|
作者：
Liu, Zhen [1 ]
Guo, Xin [2 ]
Bu, Renan [1 ]
机构：
[1] Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi'an Jiaotong University, Xi'an 710049, China
[2] AVIC Xi'an Flight Automatic Control Research Institute, Xi'an 710065, China
来源：
Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2012年 / 32卷 / 12期
关键词：
6;
D O I：
10.3969/j.issn.1672-7126.2012.12.11
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1114 / 1118
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