Compensation method for ultra precision turning error of high relative aperture surface based on coefficients of Zernike polynomial

被引：0
|
作者：
Wang, Yi [1 ]
Yu, Jingchi [1 ]
机构：
[1] Institute of Modern Optical Technology, Soochow University, Suzhou 215006, China
来源：
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering | 2012年 / 41卷 / 03期
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摘要：
10
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页码：724 / 728
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