Application of thermal atomic layer deposited Al2O3 in c-Si solar cells

被引:0
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作者
He, Yue [1 ]
Dou, Yanan [1 ,2 ]
Chu, Junhao [2 ]
机构
[1] Suntech Power Co. Ltd., Shanghai 201114, China
[2] Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
来源
Chinese Optics Letters | 2012年 / 10卷 / SUPPL.2期
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D O I
10.3788/COL201210.S22501
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