共 50 条
- [22] Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3 ULTRA CLEAN PROCESSING OF SEMICONDUCTOR SURFACES X, 2012, 187 : 357 - +
- [23] Influences of rapid thermal annealing on the characteristics of Al2O3\La2O3\Si and La2O3\Al2O3\Si films deposited by atomic layer deposition Journal of Materials Science: Materials in Electronics, 2016, 27 : 8550 - 8558
- [26] High-rate atomic layer deposition of Al2O3 for the surface passivation of Si solar cells PROCEEDINGS OF THE SILICONPV 2011 CONFERENCE (1ST INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS), 2011, 8 : 301 - 306
- [29] Al2O3 passivation on c-Si surfaces for low temperature solar cell applications PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (SILICONPV 2013), 2013, 38 : 872 - 880
- [30] A microstructural study of the thermal stability of atomic layer deposited Al2O3 thin films MICROSCOPY OF SEMICONDUCTING MATERIALS 2003, 2003, (180): : 397 - 400