Critical-dimension measurement using multi-angle-scanning method in atomic force microscope

被引：0

作者：

Murayama, Ken ^{[1
]}

Gonda, Satoshi ^{[2
]}

Koyanagi, Hajime ^{[1
]}

Terasawa, Tsuneo ^{[1
]}

Hosaka, Sumio ^{[3
]}

机构：

[1] MIRAI, Association of Super-Advanced Electronics Technologies, AIST West-7, 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan

[2] MIRAI, National Institute of Advanced Industrial Science and Technology, AIST Central-2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan

[3] Department of Nano-Material Systems, Graduate School of Engineering, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 07期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Journal article (JA)

引用

页码：5928 / 5932

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