Critical-dimension measurement using multi-angle-scanning method in atomic force microscope

被引：0
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作者：
Murayama, Ken [1 ]
Gonda, Satoshi [2 ]
Koyanagi, Hajime [1 ]
Terasawa, Tsuneo [1 ]
Hosaka, Sumio [3 ]
机构：
[1] MIRAI, Association of Super-Advanced Electronics Technologies, AIST West-7, 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan
[2] MIRAI, National Institute of Advanced Industrial Science and Technology, AIST Central-2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
[3] Department of Nano-Material Systems, Graduate School of Engineering, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2006年 / 45卷 / 07期
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Journal article (JA)
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页码：5928 / 5932
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