Plasma parameters investigation of the RF inductive plasma source with diameter 46 cm. Part II. Plasma parameters numerical simulation of the inductive and hybrid RF discharges

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[1] Aleksandrov, A.F.
[2] Vavilin, K.V.
[3] Kralkina, E.A.
[4] Neklyudova, P.A.
[5] Pavlov, V.B.
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| 1600年 / Federal Informational-Analytical Center of the Defense Industry卷
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