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- [44] Oxidation studies of silicon oxynitride using x-ray photoelectron spectroscopy and transmission electron microscopy COVALENT CERAMICS III - SCIENCE AND TECHNOLOGY OF NON-OXIDES, 1996, 410 : 393 - 398
- [45] Reoxidation of silicon nitride studied using x-ray photoelectron spectroscopy and transmission electron microscopy Gilmore, D. (damien.gilmore@onsemi.com), 1600, American Institute of Physics Inc. (95):