Effects of oxidational annealing on properties of VO2 thin films

被引：0
|
作者：
Xu, Kai [1 ,2 ]
Lu, Yuan [1 ,2 ]
Ling, Yongshun [1 ,2 ]
Qiao, Ya [1 ,2 ]
机构：
[1] Infrared Research Institution, Electronic Engineering Institute, Hefei,230037, China
[2] Infrared and Low Temperature Plasma Key Laboratory of Anhui Province, Hefei,230037, China
来源：
Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering | 2015年 / 44卷 / 12期
关键词：
Compilation and indexing terms; Copyright 2025 Elsevier Inc;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Magnetron sputtering - Film preparation - Vanadium dioxide - Fourier transform infrared spectroscopy - Crystal orientation - Titanium dioxide - Annealing - Oxide minerals - Film growth
引用
收藏
页码：3723 / 3728
相关论文
共 50 条
  • [11] Optical properties of VO2 thermal induced thin films prepared by vacuum annealing process
    Lu, Y.
    Lin, L.B.
    Jiguang Zazhi/Laser Journal, 2001, 22 (03):
  • [12] Effects of annealing ambient on oxygen vacancies and phase transition temperature of VO2 thin films
    Xu, H. Y.
    Huang, Y. H.
    Liu, S.
    Xu, K. W.
    Ma, F.
    Chu, Paul K.
    RSC ADVANCES, 2016, 6 (83) : 79383 - 79388
  • [13] VO2 Thin Films for Micromanipulators
    Ramsey, Caitlin
    Cabrera, Rafmag
    Merced, Emmanuelle
    Sepulveda, Nelson
    2012 IEEE NANOTECHNOLOGY MATERIALS AND DEVICES CONFERENCE (NMDC), 2013, : 120 - 123
  • [14] Preparation and optical properties of thermochromic VO2 thin films
    Zhao, Xiao-Ling
    Wang, Xiao
    Cao, Yun-Zhen
    Yan, Lu
    Zhang, Yu-Zhi
    Gongneng Cailiao/Journal of Functional Materials, 2013, 44 (18): : 2727 - 2730
  • [15] ELECTROMECHANICAL PROPERTIES OF THIN VO2 FILMS ON POLYIMIDE SUBSTRATES
    HAKIM, MO
    BABULANAM, SM
    GRANQVIST, CG
    THIN SOLID FILMS, 1988, 158 (02) : L49 - L52
  • [16] Tuning phase transition temperature of VO2 thin films by annealing atmosphere
    Liu, Xingxing
    Wang, Shao-Wei
    Chen, Feiliang
    Yu, Liming
    Chen, Xiaoshuang
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2015, 48 (26)
  • [17] ELECTRICAL PROPERTIES OF VO2 THIN FILMS GROWN BY PLD
    Mendoza, F.
    Fernandez, F.
    2008 17TH IEEE INTERNATIONAL SYMPOSIUM ON THE APPLICATIONS OF FERROELECTRICS, 2008, : 437 - +
  • [18] Microstructure dependent switching properties of VO2 thin films
    Lappalainen, Jyrki
    Heinilehto, Sanau
    Saukko, Sami
    Lantto, Who
    Jantunen, Heli
    SENSORS AND ACTUATORS A-PHYSICAL, 2008, 142 (01) : 250 - 255
  • [19] Evolution of structure and electrical properties with annealing time in solution-based VO2 thin films
    Guo, Yuxian
    Xu, Haiyan
    Zou, Chongwen
    Yang, Zhiyun
    Tong, Bin
    Yu, Jiangying
    Zhang, Youjie
    Zhao, Li
    Wang, Yaling
    JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 622 : 913 - 917
  • [20] The effects of niobium on the structure and properties of VO2 films
    Li, Yuanbao
    Liu, Yueyan
    Liu, Juncheng
    Ren, Lin
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2016, 27 (05) : 4981 - 4987
12345