Effect of rough dielectric layer on down-state capacitance degradation of capacitive RF MEMS switch

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[1] [1,Li, Junru
[2] 2,Gao, Yang
[3] 1,He, Wanjing
[4] Cai, Xun
[5] Huang, Zhenhua
来源：
Gao, Yang | 1600年 / Editorial Office of High Power Laser and Particle Beams卷 / 26期
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10;
D O I：
10.11884/HPLPB201426.124101
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