共 50 条
- [31] Line-width dependency on electromigration performance for long and short copper interconnects JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2010, 28 (05): : 973 - 977
- [33] Modeling the mechanisms of Cu-enhanced median time to failure in Al-Cu interconnects under electromigration MATERIALS RELIABILITY IN MICROELECTRONICS VII, 1997, 473 : 317 - 322
- [34] Modeling of electromigration-induced failure of metallic thin-film interconnects PROCEEDINGS OF THE SYMPOSIA ON ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION I AND INTERCONNECT AND CONTACT METALLIZATION: MATERIALS, PROCESSES, AND RELIABILITY, 1999, 98 (06): : 232 - 243
- [35] Impact of Side Reservoir on Electromigration of Copper Interconnects 2017 INTERNATIONAL CONFERENCE ON ELECTRON DEVICES AND SOLID-STATE CIRCUITS (EDSSC), 2017,
- [36] Investigation of electromigration in copper interconnects by noise measurements NOISE AS A TOOL FOR STUDYING MATERIALS, 2003, 5112 : 271 - 281
- [37] Via-depletion electromigration in copper interconnects 2005 IEEE INTERNATIONAL INTEGRATED RELIABILITY WORKSHOP, FINAL REPORT, 2005, : 22 - 26
- [39] Electromigration limits of copper nano-interconnects 2021 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM (IRPS), 2021,