Determination of thermal contact resistance between substrate and its support in hot filament CVD

被引：0
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作者：
Li, Lei [1 ]
Zuo, Dun-Wen [1 ]
Xu, Feng [1 ]
Li, Xiang-Feng [1 ]
Lu, Wen-Zhuang [1 ]
机构：
[1] College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2007年 / 36卷 / 01期
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页码：27 / 31
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