Characterization of charge-trap memory chip of HfO2/Al2O3 multi-layers

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作者：
机构：
[1] Tang, Zhenjie
[2] Yin, Jiang
[3] Zhu, Xinhua
来源：
Tang, Zhenjie | 1600年 / Science Press卷 / 34期
关键词：
Multilayer films;
D O I：
10.13922/j.cnki.cjovst.2014.12.12
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