Design and fabrication of electrothermal nickel microgripper

被引：3
|
作者：
Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian 116023, China [1 ]
不详 [2 ]
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来源：
Jixie Gongcheng Xuebao | 2007年 / 5卷 / 116-121期
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D O I：
10.3901/JME.2007.05.116
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