Analysis of continuous-wave laser lateral crystallized polycrystalline silicon thin films with large tensile strain

被引：0
|
作者：
Fujii, Shuntaro [1 ]
Kuroki, Shin-Ichiro [1 ]
Zhu, Xiaoli [1 ]
Numata, Masayuki [1 ]
Kotani, Koji [1 ]
Ito, Takashi [1 ]
机构：
[1] Graduate School of Engineering, Tohoku University, 6-6-05 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
来源：
Japanese Journal of Applied Physics | 2008年 / 47卷 / 4 PART 2期
关键词：
Continuous wave lasers;
D O I：
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学科分类号：
摘要：
Journal article (JA)
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页码：3046 / 3049
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