Improving the edge profiles of lithography patterns using gray-tone technique in digital photolithography

被引：0
|
作者：
Guo, Xiao-Wei
Du, Jing-Lei
Chen, Ming-Yong
Ma, Yan-Qin
Du, Chun-Lei
机构：
[1] Institute of Information Optics, Sichuan University, Chengdu 610064, China
[2] Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
来源：
Guangdian Gongcheng/Opto-Electronic Engineering | 2006年 / 33卷 / 11期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：31 / 35
相关论文
共 50 条
  • [41] Edge detection in digital images using fuzzy logic technique
    Alshennawy, Abdallah A.
    Aly, Ayman A.
    World Academy of Science, Engineering and Technology, 2009, 39 : 185 - 193
  • [42] Process optimization for sub-100 nm gate patterns using phase edge lithography
    Schenau, KV
    Vleeming, B
    Goehoel-van Ansem, W
    Wong, P
    Vandenberghe, G
    ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XVIII, PTS 1 AND 2, 2001, 4345 : 200 - 210
  • [43] FABRICATION OF SUBMICROMETER RESIST PATTERNS USING AN EDGE-DEFINED TECHNIQUE
    TAKASU, Y
    TODOKORO, Y
    ELECTRONICS LETTERS, 1984, 20 (24) : 1013 - 1014
  • [44] Edge smoothing optimization method in DMD digital lithography system based on dynamic blur matching pixel overlap technique
    Huang, Shengzhou
    Ren, Bowen
    Tang, Yuanzhuo
    Wu, Dongjie
    Pan, Jiani
    Tian, Zhaowei
    Jiang, Chengwei
    Li, Zhi
    Huang, Jinjin
    OPTICS EXPRESS, 2024, 32 (02) : 2114 - 2123
  • [45] A resolution improving method of digital PWM using pulse composite technique
    Takegami, Eiji
    Higuchi, Kohji
    Nakano, Kazushi
    Tomioka, Satoshi
    Watanabe, Kazushi
    2006 SICE-ICASE INTERNATIONAL JOINT CONFERENCE, VOLS 1-13, 2006, : 4402 - +
  • [46] Improving digital scans by using a peripheral custom tray: A dental technique
    Virard, Francois
    Millet, Catherine
    Bienfait, Alexandre
    Ducret, Maxime
    JOURNAL OF PROSTHETIC DENTISTRY, 2021, 126 (02): : 173 - 177
  • [47] Improving Teacher Performance Using an Enhanced Digital Video Reflection Technique
    Wright, Geoffrey A.
    LEARNING AND INSTRUCTION IN THE DIGITAL AGE, 2010, : 175 - 190
  • [48] Improving signal to noise ratio of seismic profiles using an image processing technique
    Wenpo Zhang
    Ping Guo
    Zaichao Yang
    Tianyue Hu
    Applied Geophysics, 2006, 3 (2) : 92 - 97
  • [49] Evaluation of aperture mask degradation in electron beam lithography using line edge roughness of resist patterns
    Yoshizawa, M
    Moriya, S
    PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY VIII, 2001, 4409 : 718 - 725
  • [50] PROJECTION MOIRE USING DIGITAL VIDEO PROCESSING - A TECHNIQUE FOR IMPROVING THE ACCURACY AND SENSITIVITY
    GASVIK, KJ
    FOURNEY, ME
    JOURNAL OF APPLIED MECHANICS-TRANSACTIONS OF THE ASME, 1986, 53 (03): : 652 - 656
12345