Ultra thin AlN layer formation at Al(111) surface by supersonic N 2 beams

被引：0
|
作者：
Teraoka, Yuden [1 ]
Yoshigoe, Akitaka [1 ]
机构：
[1] Japan Atomic Energy Agency, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan
来源：
IEEJ Transactions on Electronics, Information and Systems | 2009年 / 129卷 / 02期
关键词：
Energy thresholds - Linear profiles - Nitrogen dose - Nitrogen uptake - Photoemission spectra - Protective layers - Supersonic molecular beam - Translational energy;
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学科分类号：
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页码：294 / 295
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