Neutralization efficiency estimation in a neutral beam source based on inductively coupled plasma

被引：0
|
作者：
Vozniy, O.V. [1 ,2 ]
Yeom, G.Y. [1 ]
机构：
[1] Sungkyunkwan Advanced Institute of Nano Technology (SAINT), Sungkyunkwan University, Jangan-Gu Chunchun-Dong 300, Suwon 440-746, Korea, Republic of
[2] Kharkiv Scientific Center of Physics and Technologies, 6 Svobody sq, Kharkiv 61077, Ukraine
来源：
Journal of Applied Physics | 2009年 / 105卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Journal article (JA)
引用
收藏
相关论文
共 50 条
  • [41] Characteristics of plasma using a ferromagnetic enhanced inductively coupled plasma source
    Kim, Kyong Nam
    Lim, Jong Hyeuk
    Park, Jung Kyun
    Lim, Jong Tae
    Yeom, Geun Young
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2008, 47 (09) : 7339 - 7342
  • [42] High speed micro-fabrication using inductively coupled plasma ion source based focused ion beam system
    Menon, Ranjini
    Nabhiraj, P. Y.
    VACUUM, 2015, 111 : 166 - 169
  • [43] Optimization of ion energy spread in inductively coupled plasma source designed for focused ion beam applications
    Nabhiraj, P. Y.
    Menon, Ranjini
    Rao, G. Mohan
    Mohan, S.
    Bhandari, R. K.
    VACUUM, 2010, 85 (02) : 344 - 348
  • [44] Mathematical simulation of an inclined neutralization channel for a plasma source of neutral beams
    Degtyarev A.V.
    Kudrya V.P.
    Maishev Yu.P.
    Russian Microelectronics, 2009, 38 (3) : 171 - 179
  • [45] ECR plasma source for heavy ion beam charge neutralization
    Efthimion, PC
    Gilson, E
    Grisham, L
    Kolchin, P
    Davidson, RC
    Yu, S
    Logan, BG
    LASER AND PARTICLE BEAMS, 2003, 21 (01) : 37 - 40
  • [46] Measurement of Neutral Gas Temperature in a 13.56 MHz Inductively Coupled Plasma
    Jayapalan, Kanesh K.
    Chin, Oi Hoong
    NATIONAL PHYSICS CONFERENCE 2014 (PERFIK 2014), 2015, 1657
  • [47] Long plasma source for heavy ion beam charge neutralization
    Efthimion, Philip C.
    Gilson, Erik P.
    Grisham, Larry
    Davidson, Ronald C.
    Logan, Larry B. Grant
    Seidl, Peter A.
    Waldron, William
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2009, 606 (1-2): : 124 - 127
  • [48] Microwave plasma source for high current ion beam neutralization
    Korzec, D
    Müller, A
    Engemann, J
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2000, 71 (02): : 800 - 803
  • [49] RF plasma source for heavy ion beam charge neutralization
    Efthimion, PC
    Gilson, E
    Grisham, L
    Davidson, RC
    Yu, SS
    Logan, BG
    PROCEEDINGS OF THE 2003 PARTICLE ACCELERATOR CONFERENCE, VOLS 1-5, 2003, : 2661 - 2663
  • [50] Ferroelectric plasma source for heavy ion beam charge neutralization
    Efthimion, PC
    Gilson, EP
    Grisham, L
    Davidson, RC
    2005 IEEE PARTICLE ACCELERATOR CONFERENCE (PAC), VOLS 1-4, 2005, : 3028 - 3030
12345