Optical system design of broadband astigmatism-free Czerny-turner spectrometer

For the development trend of miniaturization and high-resolution of spectrometer, an optical design with a simple structure, broadband, astigmatism-corrected micro spectrometer was designed. The principle and correction method of the aberration of crossed beam Czerny-turner spectrometer were analyzed in detail. The broadband astigmatism-corrected theory equations using cylindrical lens were deduced. For example, a micro spectrometer operating in 300-900 nm with an object NA of 0.08 has been designed. This spectrometer adopted crossed beam structure to minish its volume and used a cylindrical lens to remove astigmatism over the full bandwidth. The analyzed results demonstrated that this spectrometer with compact configuration and small volume corrected the astigmatism in the wide spectral region. The resolution of the spectrometer was better than 0.5 nm in the whole spectral region.