Very low dielectric constants of diamond-like carbon films deposited on ground electrode by plasma-enhanced chemical vapor deposition

被引：0
|
作者：
Yokota, Katsuhiro [1 ]
Miyoshi, Yuuya [1 ]
Saoyama, Masaki [1 ]
机构：
[1] Faculty of Engineering, HRC, Kansai University, Suita, Osaka 564-8680, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1600年 / 45卷 / 2 A期
关键词：
Thin films;
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学科分类号：
摘要：
Journal article (JA)
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页码：860 / 867
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