Design and fabrication of broadband holographic ion beam etching gratings

被引：1
|
作者：
Wu, Na [1 ]
Tan, Xin [1 ]
Yu, Hai-Li [1 ]
Zhang, Fang-Cheng [1 ]
机构：
[1] Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun,130033, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2015年 / 23卷 / 07期
关键词：
741.3 Optical Devices and Systems - 743 Holography - 743.1.1 Optical Holography - 746 Imaging Techniques - 802.2 Chemical Reactions - 932.1 High Energy Physics;
D O I：
10.3788/OPE.20152307.1978
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1978 / 1983
相关论文
共 50 条
  • [31] Experimental study on submicron focused ion beam etching fabrication
    Tsinghua Univ, Beijing, China
    Weixi Jiagong Jishu, 2 (26-34):
  • [32] FINE PATTERN FABRICATION USING ION BEAM ETCHING.
    Furuya, Shigeru
    Kobayashi, Koichi
    Yamamoto, Sumio
    Fujitsu Scientific and Technical Journal, 1979, 15 (04): : 111 - 120
  • [33] FINE PATTERN FABRICATION USING ION-BEAM ETCHING
    FURUYA, S
    KOBAYASHI, K
    YAMAMOTO, S
    FUJITSU SCIENTIFIC & TECHNICAL JOURNAL, 1979, 15 (04): : 111 - 120
  • [34] Fabrication of photonic crystal structures by Focused Ion Beam etching
    Hill, M
    Cryan, M
    Lim, N
    Varrazza, R
    Heard, P
    Yu, S
    Rorison, J
    ICTON 2004: 6TH INTERNATIONAL CONFERENCE ON TRANSPARENT OPTICAL NETWORKS, PROCEEDINGS, VOL 2, 2004, : 135 - 138
  • [35] Ion beam and plasma jet etching for optical component fabrication
    Schindler, A
    Haensel, T
    Flamm, D
    Frank, W
    Boehm, G
    Frost, F
    Fechner, R
    Bigl, F
    Rauschenbach, B
    LITHOGRAPHIC AND MICROMACHINING TECHNIQUES FOR OPTICAL COMPONENT FABRICATION, 2001, 4440 : 217 - 227
  • [36] Design and fabrication of broadband polarizing beam splitter cubes
    Bischoff, Martin
    Andreae, Lars
    Weinert, Udo
    ADVANCES IN OPTICAL THIN FILMS VI, 2018, 10691
  • [37] Deep reactive ion etching and focused ion beam combination for nanotip fabrication
    Villanueva, G
    Plaza, JA
    Sánchez-Amores, A
    Bausells, J
    Martínez, E
    Samitier, J
    Errachid, A
    MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2006, 26 (2-3): : 164 - 168
  • [38] New theoretical model of the evolution of blazed gratings in the ion beam etching process
    Yuan, J. I. E.
    LI, X. I. N. G. Y. U.
    Guan, L. U. L. U.
    Liu, Z. H. U. A. N. G.
    Dong, S. H. U. O.
    Yang, Y. U. X. I. N.
    Xu, K. A. I. D. O. N. G.
    Zhuang, S. H. I. W. E. I.
    OPTICAL MATERIALS EXPRESS, 2023, 13 (05) : 1249 - 1258
  • [39] Design and fabrication of multilayer dielectric gratings for spectral beam combining
    Cho, Hyun-Ju
    Kim, Hyun-Tae
    Lee, Young-Soo
    NANOENGINEERING: FABRICATION, PROPERTIES, OPTICS, AND DEVICES XII, 2015, 9556
  • [40] Design and fabrication of holographic variable line-spacing gratings for position sensor
    Lou Jun
    Fu Shao-Jun
    Xu Xiang-Dong
    He Shi-Ping
    ACTA PHYSICA SINICA, 2006, 55 (12) : 6405 - 6409
12345