Design and fabrication of broadband holographic ion beam etching gratings

被引：1
|
作者：
Wu, Na [1 ]
Tan, Xin [1 ]
Yu, Hai-Li [1 ]
Zhang, Fang-Cheng [1 ]
机构：
[1] Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun,130033, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2015年 / 23卷 / 07期
关键词：
741.3 Optical Devices and Systems - 743 Holography - 743.1.1 Optical Holography - 746 Imaging Techniques - 802.2 Chemical Reactions - 932.1 High Energy Physics;
D O I：
10.3788/OPE.20152307.1978
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1978 / 1983
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