Local strain distributions in silicon-on-insulator/stressor-film composites

被引：0
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作者：
Kalenci, Özgür [1 ]
Murray, Conal E. [2 ]
Noyan, I.C. [1 ]
机构：
[1] Department of Applied Physics and Mathematics, Columbia University, New York, NY 10027, United States
[2] IBM T. J. Watson Research Center, Yorktown Heights, NY 10598, United States
来源：
Journal of Applied Physics | 2008年 / 104卷 / 06期
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